X-Y scan range
X-Y方向扫描范围 | 90µm x 90µm typical, 85µm minimum
90µm × 90µm 典型值，最小85µm |
Z range
Z方向扫描范围 | 10µm typical in imaging and force curve modes, 9.5µm minimum
在成像及力曲线模式下典型值为10μm；最小9.5μm |
Vertical noise floor
垂直方向噪音基底 | < 30pm RMS in appropriate environment typical imaging bandwidth (up to 625Hz)
< 30pmRMS, 在合适的环境及典型的成像带宽(达到625Hz) |
X-Y position noise(closed-loop)
X-Y定位噪音(闭环) | ≤0.15nm RMS typical imaging bandwidth (up to 625Hz)
≤0.15nm RMS，典型成像带宽(达到625Hz) |
X-Y position noise(open-loop)
X-Y定位噪音(开环) | ≤0.10nm RMS typical imaging bandwidth (up to 625Hz)
≤0.10nm RMS，典型成像带宽(达到625Hz) |
Z sensor noise level(closed-loop)
Z传感器噪音水平(闭环) | 35pm RMS typical imaging bandwidth (up to 625Hz);
50pm RMS, force curve bandwidth (0.1Hz to 5kHz)
35pm RMS，典型成像带宽(达到625Hz);
50pm RMS，力曲线成像带宽(0.1Hz to 5kHz) |
Integral nonlinearity(X-Y-Z)
整体线性误差(X-Y-Z) | < 0.5% typical
< 0.5% 典型值 |
Sample size/holder
样品尺寸/夹具 | 210mm vacuum chuck for samples, ≤210mm diameter, ≤15mm thick
210mm 真空吸盘样品台；夹具，直径 ≤210mm, 厚度 ≤15mm |
Motorized position stage
(X-Y axis)
电动定位样品台(X-Y轴)
| 180mm × 150mm inspectable area;
2µm repeatability, unidirectional;
3µm repeatability, bidirectional
180mm × 150mm可视区域;
单向2µm重复性;
双向3µm重复性 |
Microscope optics
显微镜光学系统
| 5-megapixel digital camera;
180µm to 1465µm viewing area;
Digital zoom and motorized focus
五百万像素数字照相机;
180µm至1465µm可视范围;
数字缩放及自动对焦功能 |
Controller
控制器 | NanoScope V
NanoScope V型控制器 |
Workstation
工作站 | Integrates all controllers and provides ergonomic design with immediate physical
and visual access
整合所有控制器、结合人体工学设计，提供直接的物理或可视接口 |
Vibration isolation
振动隔绝 | Integrated, pneumatic
整体式气动减震台 |
Acoustic isolation
声音隔绝 | Operational in environments with up to 85dBC continuous acoustic noise
可隔绝环境中85 dBC的持续噪音 |
AFM modes
AFM模式 | Standard: ScanAsyst, PeakForce Tapping, TappingMode (air), Contact Mode, Lateral
Force Microscopy, PhaseImaging, Lift Mode, MFM, Force Spectroscopy, Force Volume,
EFM, Surface Potential, Piezoresponse Microscopy, Force Spectroscopy;
Optional: PeakForce QNM, HarmoniX, Nanoindentation, Nanomanipulation,
Nanolithograpy, Force Modulation (air/fluid), TappingMode (fluid), Torsional
Resonance Mode, Dark Lift, STM, SCM, C-AFM, SSRM, PeakForce TUNA,TUNA,
TR-TUNA, VITA |
Certification
认证 | CE |
